基於復合封裝薄膜的水汽透過率測試系統研究

Study on Test System for Water Vapor Transmission Rate in Composite Thin Film Encapsulation

摘要: 基於活潑金屬(鈣🍋➾、鎂)電學法設計研發了用於老化測試環境下的水汽透過率測試儀器, 測試精度達到10^-6g ·m^-2· d^-1.利用本測試儀器測試了不同疊層次數的Al₂O₃/ZrO₂復合薄膜的水汽透過率, 結果表明, 多次疊層後的Al₂O₃/ZrO₂復合薄膜的水汽阻隔性能得到了較好提升.

Abstract: Based on active metal (Ca, Mg) electrical test, a new type of water vapor transmission rate (WVTR) measurement system for aging environment was designed and the precision was. 10^-6 g·m^-2·d^-1. The WVTR of the Al₂O₃/ZrOz composite films with different layers were tested based on the system. The results show that the moisture barrier properties of the Al₂O₃/ZrO₂ composite thin films after stacking have been improved.